Hello all,

I have a strange problem with SU8 structures. When we expose and develop
the structure it is wider than necessary in SEM image it is possible to
see that those wider areas are somehow different and the side of the
structure is "fluffy" not straight and even. (see the image below.
I believe it might be one of the following:
1) Over-exposure: I cannot change exposure time due to additional
adhesion problems
2) Mask is in proximity instead of contact mode: thickness of coating
varies by 1 um (I do not think that it should make such a problem)
3) Something wrong in Post-exposure (too long or too hot)

Does anyone with greater experience with SU8 could suggest anything?


--
Best regards,
Mr. Janis Klavins
EuroLCDs
Phone: +37163600300
Mobile: +37126141049

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