Hi Bill,

Thanks for the reply. Yes we do, we have PFDA to ease that, but degradation
is still obvious, do you think the anti-stiction coating will be weared off
during lifetime cycles? Thanks.


On Wed, Aug 6, 2014 at 9:17 AM, Bill Moffat 
wrote:

> Does your micromirror device have an anti-stiction coating applied to ease
> wear etc.? Bill Moffat
>
> -----Original Message-----
> From: [email protected] [mailto:
> [email protected]] On Behalf Of
> Youmin Wang
> Sent: Tuesday, August 05, 2014 7:55 PM
> To: General MEMS discussion
> Subject: [mems-talk] Wearing caused contact performance degradation for
> MEMS devices
>
> Dear ALL,
>
> I am currently working on the wearing caused degradation issue, for a
> micromirror device involving the contact of the mirror tip with the landing
> base, similar to a RF switch.
> As you may know, the contact performance, typically referring to the
> release voltage, degrades greatly after large amout of cycles of
> contact/release. I am assuming the material exchange or the surface
> roughness change are causing this, for which ANSYS simulation of wearing
> performance will shed light on the direction for the improvement.
> I am just wondering whether anyone of you have used ANSYS for
> wearing/roughness change under this topic, and do you have any comments on
> my idea of using ANSYS to deal with contact performance degradation?
>
> Thanks.
>
> Youmin Wang
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