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MEMSnet Home: MEMS-Talk: Dry etching of Au-Sn eutectic bonding metal
Dry etching of Au-Sn eutectic bonding metal
2014-09-17
anil kawan
Dry etching of Au-Sn eutectic bonding metal
anil kawan
2014-09-17
Hi,

I want to know if there is any possible way to dry etch Au(80%)-Sn(20%)
eutectic bonding metal?

Thanks,
Kawan Anil
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