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MEMSnet Home: MEMS-Talk: SU-8 and metal
SU-8 and metal
1999-07-09
Nels P Ostrom
SU-8 and metal
Nels P Ostrom
1999-07-09
Hello all-
        This subject may have already been discussed but I could not find
it on the archives.  I am trying to put a metal layer on top of
cross-linked SU-8.  My initial results have showed very poor adhesion
between titanium and SU-8.  Does anyone have any experience with this?  I
am currently testing an O2 plasma treatment and other metals.  Any help
would be greatly appreciated.  Thanks.


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