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MEMSnet Home: MEMS-Talk: PMDS-Phobic monolayer for SU-8?
PMDS-Phobic monolayer for SU-8?
2014-10-22
Dave
2014-10-23
Sophie Roman
PMDS-Phobic monolayer for SU-8?
Dave
2014-10-22
Hi All,

I'm looking for a way to treat SU-8 to keep either a dilute or solventless
PDMS off of certain areas. I'm not sure there is much of an option out
there, but I'm looking for something specific that can offer this property.

Ideally, I'd like to do normal SU-8 processing up through PEB, coat the top
of my SU-8 with this silicone-phobic material, develop away the unexposed
SU-8, and coat with PDMS to end up with it only in the trenches I defined
by photolith. Just curious if there is anything out there, sort of a
corollary to silanization of glass for water repellency.

Thanks,
Dave
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