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MEMSnet Home: MEMS-Talk: Shrinkage problem on SU8 layer on Si Substrate
Shrinkage problem on SU8 layer on Si Substrate
2014-10-23
KarthiKeyan K
2014-10-23
Andrew Sarangan
2014-10-27
KarthiKeyan K
2014-10-27
Bill Moffat
2014-10-28
Sajeesh P
2014-10-29
Andrew Sarangan
2014-10-27
Sajeesh P
Shrinkage problem on SU8 layer on Si Substrate
KarthiKeyan K
2014-10-23
Dear All,

I am facing shrinkage problem on SU8 2075 photoresist layer on Silicon
Substrate. Actually this problem accruing on soft backing process at 65C on
hotplate & hot air oven also.

Kindly suggest to over come this problem.

Thanking you,

Best Regards,
Karthi
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