Hi Dave,

You can do a silanization of your SU-8. For example using Trichloro (1H, 1H,
2H, 2H -perfluorooctyl) silane (F-OTS) which can be vapor deposited on the
surface of the SU-8. I used that before coating my SU-8 molds with PDMS.

Sophie Roman

Stanford University
Energy Resources Engineering

2014-10-21 13:14 GMT-07:00 Dave :

> Hi All,
>
> I'm looking for a way to treat SU-8 to keep either a dilute or solventless
> PDMS off of certain areas. I'm not sure there is much of an option out
> there, but I'm looking for something specific that can offer this property.
>
> Ideally, I'd like to do normal SU-8 processing up through PEB, coat the top
> of my SU-8 with this silicone-phobic material, develop away the unexposed
> SU-8, and coat with PDMS to end up with it only in the trenches I defined
> by photolith. Just curious if there is anything out there, sort of a
> corollary to silanization of glass for water repellency.
>
> Thanks,
> Dave
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