Hi,

I’m wondering how low the roughness could be on a SiN PECVD layer of 50 to 300nm
? anybody could share data ?

Thanks

-----------------------------------
Matthieu Nannini
McGill Nanotools Microfab
Manager
t: 514 398 3310
c: 514 758 3311
f: 514 398 8434
http://mnm.physics.mcgill.ca/
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