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MEMSnet Home: MEMS-Talk: Dry, or tape photoresist for DRIE
Dry, or tape photoresist for DRIE
2015-02-25
K.Vossough
2015-02-27
venkatesh bharadwaja
Dry, or tape photoresist for DRIE
K.Vossough
2015-02-25
Has anyone worked with the dry (or tape) photoresist sheets that acts as a mask
for DRIE etches ? If so, could you please recommend a specific type for our
backside through si etch ? We have fairly large features, 100umx100um windows
that we'd like to etch through the wafer.

Thanks,

        --Kris

K. Vossough, Ph.D.
Nano and Micro Technology Consultants
E-mail: [email protected]
Voice: (408)373-5413
Fax: (650)798-5001
MEMS and Nano Technology :: Nano and Micro Technology Consultants
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