Hello,

For my project, I want to fabricate microchannels on silicon wafer and I
need some help.I have a 4 inch silicon wafer and my channels are going to
be etched on chips with the dimensions of 15 mm by 15 mm. The channels are
300 micron deep and the smallest width of channels is 50 microns. Another
thing is that my coolant is a segmented glow containing liquid metal
(Galinstan) and mineral oil, and Galinstan is corrosive to metals.
I read in different literature that anodic bonding is used to cover the
chip with glass. If I use the same process, how can I connect my inlet and
outlet tubes to the chip to pump the coolant? Should I make holes on glass?

I'd appreciate any help.
Thank you
Leily
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