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MEMSnet Home: MEMS-Talk: Spin on Glass applications for MEMS
Spin on Glass applications for MEMS
2015-06-04
Bob Henderson
2015-06-04
Bill Moffat
2015-06-05
Shay
2015-06-05
Bob Henderson
2015-06-08
Bill Moffat
2015-06-10
Shay
2015-06-08
Erik Peterson
2015-06-08
Youmin Wang
2015-06-08
Rajul Patkar
2015-06-08
Sales
Spin on Glass applications for MEMS
Bob Henderson
2015-06-04
I have recently relocated my equipment business next door to a company that
manufactures a variety of spin on glass (SOG) formulations. I am trying to
get up to speed on applications that require SOG for various MEMS
applications. I understand a Boron SOG can be used as an etch stop in
silicon for making membranes but I need to understand if there are other
applications SOG is being used for such as to build transistors due to its
low temperature applications. Any help would be appreciated. Bob Henderson

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