Bob I asked ken Sautter a more recent process engineer than I am.  He and I do
not know of any specific uses for Boron doped spin on glass.  We get asked for
our 450 degree ovens frequently for curing spin on glass. But we do not get
involved in the uses of the glass. Will try some more engineers later.  Let me
know if I can help any other way.  Bill

-----Original Message-----
From: [email protected] [mailto:mems-
[email protected]] On Behalf Of Bob
Henderson
Sent: Thursday, June 04, 2015 9:01 AM
To: 'General MEMS discussion'
Subject: [mems-talk] Spin on Glass applications for MEMS

I have recently relocated my equipment business next door to a company that
manufactures a variety of spin on glass (SOG) formulations. I am trying to get
up to speed on applications that require SOG for various MEMS applications. I
understand a Boron SOG can be used as an etch stop in silicon for making
membranes but I need to understand if there are other applications SOG is being
used for such as to build transistors due to its low temperature applications.
Any help would be appreciated. Bob Henderson

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