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MEMSnet Home: MEMS-Talk: Spin on Glass applications for MEMS
Spin on Glass applications for MEMS
2015-06-04
Bob Henderson
2015-06-04
Bill Moffat
2015-06-05
Shay
2015-06-05
Bob Henderson
2015-06-08
Bill Moffat
2015-06-10
Shay
2015-06-08
Erik Peterson
2015-06-08
Youmin Wang
2015-06-08
Rajul Patkar
2015-06-08
Sales
Spin on Glass applications for MEMS
Shay
2015-06-05
Bob

SOG can be used for wafer bonding.

Shay



> On Jun 4, 2015, at 19:01, Bob Henderson 
wrote:
>
> I have recently relocated my equipment business next door to a company that
> manufactures a variety of spin on glass (SOG) formulations. I am trying to
> get up to speed on applications that require SOG for various MEMS
> applications. I understand a Boron SOG can be used as an etch stop in
> silicon for making membranes but I need to understand if there are other
> applications SOG is being used for such as to build transistors due to its
> low temperature applications. Any help would be appreciated. Bob Henderson
>
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