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MEMSnet Home: MEMS-Talk: SU8 2075 Pattern - Reg:
SU8 2075 Pattern - Reg:
2015-06-25
KarthiKeyan K
2015-06-30
Black, Robert
2015-07-01
KarthiKeyan K (2 parts)
2015-07-01
Black, Robert (2 parts)
2015-06-30
Daniel Figura
2015-07-01
KarthiKeyan K (2 parts)
2015-07-01
Daniel Figura (2 parts)
2015-06-30
KarthiKeyan K (2 parts)
SU8 2075 Pattern - Reg:
KarthiKeyan K
2015-06-25
​Dear Friends,

Actually i am working in SU8 2075 negative ​photoresist and am facing to
achieve exact size of mask pattern on my SU8 photoresist for the example my
mask pattern size is 50 micro meter means i have achieved 60 micro meter.


So Please suggest how to get exact size of the mask pattern on my SU8
Photoresist layer??? any parameter to get exact size of the mask pattern on
my SU8 Photoresist.??

Looking forward to your suggestions.

Thanking you,

Best Regards,
Karthi
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