Hello,

if a poor adhesion is the problem, I would suggest to use a metallic
adhesion layer like chromium or titanium.

Regards,
André

-----Ursprüngliche Nachricht-----
Von: [email protected]
[mailto:[email protected]] Im
Auftrag von bhargav panchal
Gesendet: Sonntag, 29. November 2015 18:01
An: General MEMS Discussion
Betreff: [mems-talk] Silicon Carbide Issue

We have problem regarding nickle deposition on Silicon nitride by
sputtering. Prior to deposition we have removed the oxides from the surface.
Please suggest possible solution.

Have a good day everyone.

Regards, Bhargav Panchal+91 9742712671
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