Hello Leily,
you should use adhesion promoters/primers for bonding polymers. Have a look
at GELEST or UNITED CHEMICAL TECHNOLOGIES for e.g. There you can find
technical guides to choose the right primer for your combination of
materials. Silane-based promoters work excellent on substrates like silicon,
glass, aluminum. Please refer to the process guides from the manufacturers.
A wrong application will lead rather to an "anti-sticking-coating" than to
an adhesion layer.
For SU-8 (epoxy) there are two common adhesion promoters:
- 3-Aminopropyltriethoxysilane and
- 3-Glycidoxypropyltrimethoxysilane
For silicones (PDMS):
- 3-Aminopropyltriethoxysilane and
- Allyltrimethoxysilane
Regards,
André
-----Ursprüngliche Nachricht-----
Von: [email protected]
[mailto:[email protected]] Im
Auftrag von Leily Majidi
Gesendet: Montag, 15. Februar 2016 23:40
An: [email protected]
Betreff: [mems-talk] Silicone-plastic bonding
Hello all,
I am having problem bonding silicone chip which is coated with chromium to
Lexan ploycarbonat cover. The bonding seems good, however I have leakage in
my device at the edges.
I have microchannels on my chip and I need to have a flow through
microchannels. I used SU8-2 with the thickness around 5 um. After spin
coating, I baked two parts and then used UV and finally post bake.
I appreciate it if you share your knowledge with me.
Thanks!
Leily
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provider of MEMS and Nanotechnology design and fabrication services.
Visit us at http://www.mems-exchange.org
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