Transene Company offers titanium etchants that could work.  Please visit.
http://transene.com/ti/

Chris Christuk

From: [email protected] [mailto:mems-talk-
[email protected]] On Behalf Of KarthiKeyan K
Sent: Sunday, May 29, 2016 9:20 AM
To: General MEMS discussion
Subject: [mems-talk] suitable etchant for titanium thin layer on silicon
substrate

Dear Friends,

Kindly suggest suitable etchant for titanium thin layer on silicon substrate.
(PPR mask pattern over the titanium thin layer)

Looking forward to you reply.

--

Thanks & Best Regards,
KarthiKeyan K

​
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