hydrofluoric acid should work

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Best regards,

Xing Sheng
2016-06-01

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*From:* KarthiKeyan K 
*Date:* 2016-05-29 21:50
*To:* General MEMS discussion 
*Subject:* [mems-talk] suitable etchant for titanium thin layer on silicon
substrate
Dear Friends,

Kindly suggest suitable etchant for titanium thin layer on silicon
substrate. (PPR mask pattern over the titanium thin layer)

Looking forward to you reply.

--

Thanks & Best Regards,
*KarthiKeyan K*

​
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