Hi
You can try BOE. (HF 10:1 or 6:1)

Shay

> On May 29, 2016, at 16:20, KarthiKeyan K  wrote:
>
> Dear Friends,
>
> Kindly suggest suitable etchant for titanium thin layer on silicon substrate.
(PPR mask pattern over the titanium thin layer)
>
> Looking forward to you reply.
>
> --
>
> Thanks & Best Regards,
> KarthiKeyan K
>
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