Dear Mehmet

Maybe you can spray coat your protective coating on the substrate.

It should be gentile process comparing spin coating.

Regards.

Basar


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iPhone'umdan gönderildi

21 Haz 2016 tarihinde 00:05 saatinde, HORACIO ESTRADA VAZQUEZ
 şunları yazdı:

> I think laser dicing is the best scenario for the application/situation
> that you are entretaining.
> Not difficult to implement!
>
> Best regards,
>
> HE
>
> *             _______*
>
> *Horacio V. Estrada, PhD*
> Director
> Laboratorio de Microsistemas
> CIDESI
> Queretaro, QRO
> Phone: +52 (442) 211-9800 x1511
> Cell MEX: +52 (442) 471-4179,
> Cell USA: +1 (980) 254-6951
> ________________________
>
> 2016-06-20 2:11 GMT-05:00 Mehmet Yilmaz :
>
>> Dear mems-talk community,
>> We have a standard Si wafer that we would like to dice into smaller 1cm x
>> 1cm square pieces.
>>
>> The challenge is below:
>> 1. We have very delicate structures on the Si wafer. So, we cannot flow
>> *strong* air and/or water on Si wafer while dicing. The *strong* flow of
>> air/wafer damages the delicate structures.* Here, it is very important to
>> emphasize that, the main contributors to the damage are strong water flow
>> and/or strong air flow.*
>>
>> As part of the solution,
>> We can sacrifice a blade of a dicing saw (~30 USD), and just try to dice
>> the wafer without water/air flow. However, we are concerned that we may be
>> damaging more than just the blade of the dicing saw when we do not let
>> air/water flow during dicing. In case you wonder, the dicing saw is from
>> DISCO, and the type is DAD3220.
>>
>> Also,
>> We may try spinning photoresist on the wafer to protect the delicate
>> structures, but we are reluctant about spinning photoresist as well, due to
>> some requirements on the final structures.
>>
>> Any comments from you who might have had this or similar experience in the
>> past or currently, would really be appreciated.
>>
>> Thanks in advance.
>>
>> Regards,
>>
>> Mehmet Yilmaz
>> Mechanical Engineer
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> _______________________________________________
> Hosted by the MEMS and Nanotechnology Exchange, the country's leading
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_______________________________________________
Hosted by the MEMS and Nanotechnology Exchange, the country's leading
provider of MEMS and Nanotechnology design and fabrication services.
Visit us at http://www.mems-exchange.org

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