Hello John,
How many substrates do you actually need?
Daniel
-----Original Message-----
From: [email protected]
[mailto:[email protected]] On
Behalf Of John Bohland
Sent: Wednesday, June 29, 2016 2:57 AM
To: [email protected]
Subject: [mems-talk] How to make a metal grid
I am interested in making a metal grid on a 370 mm X 470 mm glass substrate.
The problem is that the metallization lines must be only 1.5 microns in
width and spaced (pitch) only a few microns apart.
The metal can be Al or Ag and 100 nm thick.
The best idea I have is to monolithically coat the glass with sputtered
(PVD) Al or Ag then use a picoseond laser to remove all but the desired 1.5
micron wide metal line widths. Even then I don't know if the laser would
have good enough resolution to meet these requirements.
Anyone have better ideas?
Thanks,
John
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