KI (potassium iodide) + I2 (iodine) also etches gold, but not silver, and
doesn't attack photoresist (but the PR sometimes peels).
I measured an etch rate for evaporated gold of 660 nm/min for a commercial mix
called AU-5 from Cyantek.
Kirt Williams
[email protected] cell 650-224-3503
-----Original Message-----
From: Bob Henderson [mailto:[email protected]]
Sent: Saturday, March 17, 2018 10:14 AM
To: 'General MEMS discussion'
Subject: Re: [mems-talk] Potassium iodate effect on gold?
Mario:
We used to call that mixture "Turkey Blood" and it does a fine job etching gold
and silver and still preserving the photo resist pattern you might remove if you
used something like Aqua Regia. Bob Henderson
-----Original Message-----
From: Gianmario Scotti [mailto:[email protected]]
Sent: Thursday, March 15, 2018 3:32 AM
To: General MEMS discussion
Subject: [mems-talk] Potassium iodate effect on gold?
Hello all,
I have what might sound as an odd question, but hear me out nonetheless:
what effect does potassium iodate have on pure gold (let's say, evaporated)? Or
does the gold perhaps reduce the iodate?
Thanks in advance,
mario
--
Gianmario Scotti
Researcher
Leibniz-Institut für Ostseeforschung Warnemünde Seestraße 15
18119 Rostock
Germany
Visiting researcher
Aalto University, School of Electrical Engineering http://elec.aalto.fi/en/
Micronova, Tietotie 3
02150 Espoo
Finland
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