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MEMSnet Home: MEMS-Talk: Dry etch for Cr
Dry etch for Cr
1999-07-18
Siddharth Kiyawat
Dry etch for Cr
Siddharth Kiyawat
1999-07-18
hi,
  Can someone provide me with a recipe for dry etching of Chromium
(50 angstrom layer)?
Thanks,
Siddharth
reply
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