Hi,

I am looking for SOI wafers (4" diameter) with a rather thick oxide
layer (1 micron) and 1.5 micron SOI layer, with tight tolerances (5%).
Any advice on where I could get these is appreciated.

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Alexander Hölke, Postdoctoral Associate
 Massachusetts Institute of Technology
 Microsystems Technology Laboratory
 60 Vassar Street                    Phone: 617-253-0724
 Room 39-663                         Fax: 617-253-9606
 Cambridge, MA 02139                 [email protected]
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