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MEMSnet Home: MEMS-Talk: Re: Using MOSFETs in mechanical sensors
Re: Using MOSFETs in mechanical sensors
1999-09-04
Vladimir Skvortzov
Re: Using MOSFETs in mechanical sensors
Vladimir Skvortzov
1999-09-04
"
Try the following source:

H. Takao, Y. Matsumoto, M. Ishida, Stress-sensitive differential
amplifiers using piezoresistive effects of MOSFETs and their application
to three-axial accelerometers, Sensors and Actuators A Physical, vol.
65, no. 1, 1998, pp. 61-68.


anagil wrote:
>
> I am working in a force sensor and I4ve heard that now the MOSFETs are
> used as sensor elements, but I can4t find information about this so I
> decided write my questions in the forum.
> If you could give me some references about books, articles or similar I
> will be very grateful.
>
>               Thanks for your help,
>
>  ___________________________________________________________________
>  Consigue tu e-mail gratuito OLE.COM
>  Haz click en  target=new>http://www.olemail.com
>
>

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