Hi,

I have huge stiction problems, any suggestions on
sites/articles/people concerning freeze-dry techniques? Or other anti
stiction techniques?

Setup: SOI-wafers, beams 1500 microns long, 25 microns width, 8
microns thick, and a 1.5 micron gap under the beam.

/Thomas Frisk
[email protected]
Elmät / S3
KTH
Sweden