Try this reference: Stiction in surface micromachining. J. Micromech.
Microeng.  6 (1996) 385-397

Yahong


>From: Thomas Frisk 
>Reply-To: Thomas Frisk , [email protected]
>To: [email protected]
>Subject: Freeze-dry sites/articles
>Date: Thu, 9 Sep 1999 08:51:16 +0200
>
>Hi,
>
>I have huge stiction problems, any suggestions on
>sites/articles/people concerning freeze-dry techniques? Or other anti
>stiction techniques?
>
>Setup: SOI-wafers, beams 1500 microns long, 25 microns width, 8
>microns thick, and a 1.5 micron gap under the beam.
>
>/Thomas Frisk
>[email protected]
>Elmdt / S3
>KTH
>Sweden
>

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