A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: alumina etch rate in HF
alumina etch rate in HF
1999-09-21
Siddharth Kiyawat
alumina etch rate in HF
Siddharth Kiyawat
1999-09-21
hi,
  i would like to know the etch rate of Alumina (Al2O3, aluminium oxide)
in HF. It would be great if u could provide me with the relevant reference
(book/journal etc..) also.
thanks
Siddharth


reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
MEMStaff Inc.
Tanner EDA by Mentor Graphics
Process Variations in Microsystems Manufacturing
University Wafer