Generally, I would recommend checking into Marangoni effect driers used for
semiconductors and
flat panel displays.  There are several vendors including Yield-Up, AOI, and
CFM.  They usually include
quick-dump DI water rinse functions with optional Ultra/Megasonic agitation,
followed by a slow (2-5 mm/sec) drain with IPA vapor backfill.  The IPA
causes the Marangoni effect (surface tension gradient)
to sweep small particles and water off the surfaces. The slight residual IPA
is quickly evaporated with N2.

Bob Crocker