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MEMSnet Home: MEMS-Talk: BPSG
BPSG
1999-10-25
Roger Hartmann
BPSG
Roger Hartmann
1999-10-25
Hello Everyone,

I need some background information on BPSG thin films and was wondering if
anyone
on this list could point me in the right direction.  I'm looking for books,
articles,
personal knowledge, etc.

I am mainly interested in it's important properties, and how the structure/
composition
of the film influences or controls those properties.

Thank you for your time,

-Roger Hartmann
[email protected]


reply
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