Dear Colleagues,
in the use of multiple layers of 4620 and 4903 resists, is there a
preferred method of  softbake? We are talking of total of 30 microns thick
built up in 5 layers. I have both vacuum oven bake and hotplate available.

Yours sincerely,

Patrick Leech,
CSIRO CMST,
Private Bag 33, Clayton South MDC,
Victoria , Australia.