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MEMSnet Home: MEMS-Talk: Measure thermal expansion coefficience of thin film
Measure thermal expansion coefficience of thin film
1999-10-29
[email protected]
Measure thermal expansion coefficience of thin film
[email protected]
1999-10-29
I am interested to know the ways to measure thermal expansion coefficience
of thin film like
SiO2 with thickness of 2000A - 5000A.

Thank you for your information.

Fan Ye
[email protected]


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