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MEMSnet Home: MEMS-Talk: MEMS accelerometer with 5-10 nm accuracy
MEMS accelerometer with 5-10 nm accuracy
1999-11-03
[email protected]
MEMS accelerometer with 5-10 nm accuracy
[email protected]
1999-11-03
Dear Clolleague:

I am working on high-precision position control. I am looking the accelerometer
for position feedback detection with accuracy at 5-10 nano-memter.

I remember one engineer in this Web-site has develped this device. Please send
to me at above E-mail address if you can help me.


Zhonxue Gan
ABB USPPL


reply
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