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MEMSnet Home: MEMS-Talk: Re: Cu and Cr evaporation on Si
Re: Cu and Cr evaporation on Si
1995-12-08
Carlos Mastrangelo
Re: Cu and Cr evaporation on Si
Carlos Mastrangelo
1995-12-08
There is a lot pd literature on Cu metallization. Ti works much better that Cr.
Try that and check my paper in Hilton-head 94

Carlos Mastrangelo
Univ. of Michigan


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