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MEMSnet Home: MEMS-Talk: Chromium Oxide etch rate in BHF
Chromium Oxide etch rate in BHF
1999-11-12
B.J. Gallacher
Chromium Oxide etch rate in BHF
B.J. Gallacher
1999-11-12
Hello,

Can anyone tell me the etch rate of Cr2O3 in BHF?

I was hoping to use Cr as an adhesion layer for Au and also as a mask
against BHF. However, a previous step releases a lot O2 which I think may
oxidise the Cr.


Regards
Barry Gallacher


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