Make a capacitor out of it and measure the capacitance. A small disk
should work just be sure your disk is smaller than the masked area you
are measuring so the edge effects are the same every time.

Gordon

Gordon Couger [email protected]
Owner PRAG-L PRactical AGriculture List  www.couger.com/prag-l
Stillwater, OK        405 624-2855   GMT -6:00
-----Original Message-----
From: Ramadas, Padmaja 
To: [email protected] 
Date: Saturday, January 23, 1999 7:58 PM
Subject: Equipment for measuring thick polymers


>I am looking for equipments that can measure thick resist more than 30 um
upto 100um or more on silicon wafers. I would appreciate any directions I
can have on it.
>
>Thank you,
>
>Regards,
>
>Padmaja
>
>
>