Try Case Western Reserve University.  They developed such a process for us
several years ago.
Jeff Melzak is the point of contact for wafer services.





At 08:27 PM 2/1/99 -0800, you wrote:
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>--------------2A219C626459F18EFAE28638
>Content-Type: text/plain; charset=us-ascii
>Content-Transfer-Encoding: 7bit
>
>Does anybody know a source for CVD of in-situ boron doped polysilicon?
>I want to do this on 3" squre substrate.
>
>Please let me know.
>
>Thanks
>
>Matt
>
>--------------2A219C626459F18EFAE28638
>Content-Type: text/x-vcard; charset=us-ascii; name="vcard.vcf"
>Content-Transfer-Encoding: 7bit
>Content-Description: Card for Matthew Wilcox
>Content-Disposition: attachment; filename="vcard.vcf"
>
>begin:          vcard
>fn:             Matthew Wilcox
>n:              Wilcox;Matthew
>org:            MEMS Inc.
>adr;dom:        MEMS Inc.;;5650 Stewart Avenue;Fremont;CA;94538;
>email;internet: [email protected]
>tel;work:       (510)657-7616
>tel;fax:        (510)657-8906
>tel;home:       Home Office (510)770-1246
>x-mozilla-cpt:  ;0
>x-mozilla-html: FALSE
>version:        2.1
>end:            vcard
>
>
>--------------2A219C626459F18EFAE28638--
>
>
>
Jonathan Bernstein
MEMS Technology Center
Draper Labs, MS 37
555 Technology Square
Cambridge, MA 02139 USA

[email protected]
Tel. (617) 258-2513
Fax  (617) 258-4238