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MEMSnet Home: MEMS-Talk: Re: In-situ Boron doping of polysilicon
Re: In-situ Boron doping of polysilicon
1999-02-02
Jonathan Bernstein
1999-02-03
SEED
1999-02-02
Lynn Rathbun
Re: In-situ Boron doping of polysilicon
Jonathan Bernstein
1999-02-02
Try Case Western Reserve University.  They developed such a process for us
several years ago.
Jeff Melzak is the point of contact for wafer services.





At 08:27 PM 2/1/99 -0800, you wrote:
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>Does anybody know a source for CVD of in-situ boron doped polysilicon?
>I want to do this on 3" squre substrate.
>
>Please let me know.
>
>Thanks
>
>Matt
>
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Jonathan Bernstein
MEMS Technology Center
Draper Labs, MS 37
555 Technology Square
Cambridge, MA 02139 USA

[email protected]
Tel. (617) 258-2513
Fax  (617) 258-4238


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