Wlodek-
We use invar shadow masks for sputtering and buy them from Photo Etch
Technology in Massachusetts. Their number is (508) 937-7989. To maintain
flatness, I've made fixtures with a ceramic disk magnet on the bottom which
pulls the shadow mask flat against the substrate. The magnets are compatible
with vacuum systems.

Rich Hjulstrom
Moore Process Automation Solutions
Spring House, PA USA
(215) 646-7400 x2420
[email protected]

> ----------
> From:         WLODEK KAPLAN -1023[SMTP:[email protected]]
> Reply To:     WLODEK KAPLAN -1023;[email protected]
> Sent:         Thursday, February 04, 1999 3:24 AM
> To:   [email protected]
> Subject:      shadow masks
>
> Hello,
>
> We are using shadow contact masks made of Si for one of the
> metalization processes. They are fabricated by cutting holes wih
> laser in thin silicon wafers, so they can be very easily damaged
> during the alignment procedure. The alternative substrate for mask
> fabrication would be metal but the problem is the flatness of the
> mask after fabrication because we need around 100 holes on 100 mm
> wafer.
>
> Does anyone have experience with shadow masks and/or know the
> supplier of shadow masks made of metal?
>
> Wlodek Kaplan
>
> *