One method of forming shadow masks in metal is to use chemical lithography.
One such company here in the US is:

FOTOFABRICATION CORP.

3758 W. Belmont Avenue
Chicago, IL 60618

Eric Smith is the man to talk to.

Tel: +(773) 463 6211




Karl H. Cazzini (Ph.D)
Research & Development Consultant
57 Auburn Street (ext.), Suite 3,
Framingham MA 01701
U.S.A

Tel (508) 620 8845 / (508) 875 2009
Fax (508) 620 8839


-----Original Message-----
From: [email protected] [mailto:[email protected]]On Behalf Of WLODEK
KAPLAN -1023
Sent: Thursday, February 04, 1999 3:25 AM
To: [email protected]
Subject: shadow masks


Hello,

We are using shadow contact masks made of Si for one of the
metalization processes. They are fabricated by cutting holes wih
laser in thin silicon wafers, so they can be very easily damaged
during the alignment procedure. The alternative substrate for mask
fabrication would be metal but the problem is the flatness of the
mask after fabrication because we need around 100 holes on 100 mm
wafer.

Does anyone have experience with shadow masks and/or know the
supplier of shadow masks made of metal?

Wlodek Kaplan

*