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MEMSnet Home: MEMS-Talk: Re: Better resolution for desktop publishing masks
Re: Better resolution for desktop publishing masks
1999-02-05
Ashutosh Shastry
1999-02-05
Mark Bachman
1999-02-05
Ji Fang
1999-02-05
Ashutosh Shastry
1999-02-09
Ashutosh Shastry
1999-02-05
[email protected]
1999-02-08
Amit Shiwalkar
Re: Better resolution for desktop publishing masks
Mark Bachman
1999-02-05
John,

Many prepress bureaus output to film at 5080 dpi now which is a raster size
of 5 microns. We regularly have our masks made at this resolution and have
been very satisfied. Check your Yellow Pages under desktop publishing.

-Mark.


>        I have recently used a commercial printer to make a mask on printer's
>film.  He used a Linotronic printer with 2540 dpi.  The mask gave us about 25
>micron resolution, which I understand is pretty typical.
>        I would really like about 10 micron resolution, but our
>photolithography system does not have reduction capability (only 1:1).  Does
>anyone know how to get closer to 10 microns?  Try to find higher dpi
>capabilities?  Commercially available reduction to make a new mask from the
>existing mask?
>        Any suggestions would be appreciated.
>
>John Lodmell
>[email protected]
>

--------------------------------------------
Mark Bachman, Ph.D.
[email protected] / 949-824-6421 (-3732 fax)
Research Physicist, Microsystems Engineering
University of California at Irvine


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