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MEMSnet Home: MEMS-Talk: Thick Resists for Au plating
Thick Resists for Au plating
1999-02-09
Todd Green
Thick Resists for Au plating
Todd Green
1999-02-09
Hi,

I'm looking for resists that can be spun up to around 25 microns and have
good compatability with alkaline (pH=10) gold sulfite plating bath. We are
using SJR 3740 but are interested in other alternatives. We tried SU-8
but can't find anything to remove it. Is there anything else available?

Thanks,

Todd Green


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