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MEMSnet Home: MEMS-Talk: RE: Thick Resists for Au plating
RE: Thick Resists for Au plating
1999-02-10
Ramadas, Padmaja
1999-02-10
Sanjay Dhar
1999-02-15
Ramadas, Padmaja
1999-02-10
Ramadas, Padmaja
1999-02-10
Sanjay Dhar
1999-02-15
Ramadas, Padmaja
1999-02-15
Shekhar Bhansali
RE: Thick Resists for Au plating
Ramadas, Padmaja
1999-02-10
You can look into AZ4620. That is thick resist. Should be able to remove it.

Regards,

Padmaja

Padmaja Ramadas                                         (972)-927-1108 (w)
Texas Instruments Incorporated                  (972)-995-8787(fax)
Microcomponents Technology Center               [email protected]
Semiconductor Research & Development
P.O. Box 655012
M/S 945
Dallas, Texas  75265


> -----Original Message-----
> From: Todd Green [SMTP:[email protected]]
> Sent: Tuesday, February 09, 1999 12:35 PM
> To:   [email protected]
> Subject:      Thick Resists for Au plating
>
> Hi,
>
> I'm looking for resists that can be spun up to around 25 microns and have
> good compatability with alkaline (pH=10) gold sulfite plating bath. We are
> using SJR 3740 but are interested in other alternatives. We tried SU-8
> but can't find anything to remove it. Is there anything else available?
>
> Thanks,
>
> Todd Green
>
>


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