Dear All,
        Can anyone help by telling me does a MUMPs (surface micromachined)
resonator work without having a grounding Poly0 layer beneath its
suspended mass (Poly1 layer) and if possible, why ?

        By the way, does anyone know the breakdown voltage for the nitride
for MUMPs devices ?

        Thanks !

        CHUA Bee Lee
        Undergraduate
        Dept of Mechanical & Production Engineering
        National University of Singapore