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MEMSnet Home: MEMS-Talk: metal on the bottom of V-grooves
metal on the bottom of V-grooves
1999-02-11
Vlad Badilita
metal on the bottom of V-grooves
Vlad Badilita
1999-02-11
        Dear colleagues,

        I am interested to apply a metal layer (CrAu for instance) in an array
of
V-grooves anisotropically etched in (100) Si. My question is the following:
        Are there any troubles regarding the metal deposition on the bottom of
the
V-grooves? If yes, how can I deal with those troubles?
        (the V-grooves are 70 microns wide and 30 microns deep)
        Best regards
        Vlad Badilita
Vlad Badilita - dipl. phys.
Multidisciplinary Research Dpt.
Micromachined Structures, Microwave Devices and Circuits Lab.
National Institute for Research and Development in Microtechnologies
                IMT - Bucharest
P.O. Box 38-150, Bucharest 72225, Romania
Fax: +40-1-230.75.19, +40-1-411.46.61
Web page: http://www.imt.ro


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