Dear researchers

Your idea of creating a faq about the SU-8 will be very useful for many
beginners in this subject.
To complete your web site , please add this URL
http://dmtwww.epfl.ch/ims/micsys/subtopics/projects/su8/EPON.html

These pages collect all the informations about the SU-8 since we began
working and developping processes on the SU-8 with IBM-Zurich in january
1996.

The success of this product has motivated IBM to sell a license of
fabrication to MCC. Now the SU-8 is worldwide available.
On its side at the EPFL many publications have been writen and the main part
of my thesis is dedicated to this resist.
Finally two spin-off have been created :

SOTEC : commercialisation of microfluidic devices in SU-8
([email protected])

MIMOTEC : commercialisation of micromolds fabricated by a UV-LIGA process
([email protected]). For this process we have built a small clean
room unit fully dedicated to SU-8 microfabrication.

Hope you have more matter for you FAQ. If you need additionnal informations
email me.

Best regards


Hubert Lorenz

************************

MIMOTEC SA
Dr. Hubert Lorenz
Blancherie 63
CH-1950 SION
Tél : 0041 27 329 08 36
Fax: 0041 27 329 08 37

[email protected]

*****************************************


Franck wrote :

-----Message d'origine-----
De : Franck CHOLLET 
À : [email protected] 
Date : samedi, 13. février 1999 01:07
Objet : SU-8 data


>Dear MEMS companions,
>the thick photoresist SU-8 is becoming more and more important to the MEMS
>community. However its use is far from easy, and standard photolythographic
>process have to be substantially adapted.
>To help beginners and others, a database on the subject, mixing literature
>reference and experimental ones seems a good idea (a SU-8 FAQ in fact, that
>surely rejoins the recent appeal for more information *exchange* in the
>community :-). But it needs your help.
>Those over there who possess data on the resist (ANY data: process data,
>physical properties, characterisation results...), please send them to me,
>and they will be included on a webpage with credits, of course.
>Moreover, if you have already made a webpage on the subject, give me its
>address and I will link it from the page.
>The data already collected may be found at:
>http://aveclafaux.freeservers.com/SU-8.html#top
>As you may see it is just a beginning, but it will grow with your help!
>
>Thank you,
>Franck
>
>
>