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MEMSnet Home: MEMS-Talk: RE: Thick Resists for Au plating
RE: Thick Resists for Au plating
1999-02-10
Ramadas, Padmaja
1999-02-10
Sanjay Dhar
1999-02-15
Ramadas, Padmaja
1999-02-10
Ramadas, Padmaja
1999-02-10
Sanjay Dhar
1999-02-15
Ramadas, Padmaja
1999-02-15
Shekhar Bhansali
1999-02-19
Yohannes
RE: Thick Resists for Au plating
Ramadas, Padmaja
1999-02-15
Did you try PMMA??

-----Original Message-----
From: Sanjay Dhar [mailto:[email protected]]
Sent: Friday, February 12, 1999 6:54 PM
To: [email protected]
Subject: FW: Thick Resists for Au plating


AZ 4620 is regularly used for Cu and Au plating in 25 micron application.
> ----------
> From:         Todd Green[SMTP:[email protected]]
> Reply To:     Todd Green;[email protected]
> Sent:         Tuesday, February 09, 1999 10:35 AM
> To:   [email protected]
> Subject:      Thick Resists for Au plating
>
> Hi,
>
> I'm looking for resists that can be spun up to around 25 microns and have
> good compatability with alkaline (pH=10) gold sulfite plating bath. We are
> using SJR 3740 but are interested in other alternatives. We tried SU-8
> but can't find anything to remove it. Is there anything else available?
>
> Thanks,
>
> Todd Green
>
>
>


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