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I am using a boron etch stop to build a hinge on silicon. What is the
best anisotropic etchant to use. I am considering KOH, TMAH, EDP, etc.

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Steve Forgrieve
Department of Electrical Engineering
The University of Edinburgh
King's Buildings
Mayfield Rd
Edinburgh EH9 3JL
(Int +44) 131 650 5665 (enquiries)
email: [email protected]



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I am using a boron etch stop to build a hinge on silicon. What is the best
anisotropic etchant to use. I am considering KOH, TMAH, EDP, etc.
-- 
Steve Forgrieve
Department of Electrical Engineering
The University of Edinburgh
King's Buildings
Mayfield Rd
Edinburgh EH9 3JL
(Int +44) 131 650 5665 (enquiries)
email: [email protected]
 

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