Does anyone know where I can find an instrument that can measure a 15
micrometers deflection of a MEMS structure with a load in mili-Newton
range? The sample is a doubly supported beam which is 200 micrometers long
and 100 micrometers wide and 10 micrometers thick.
Thanks in advance.



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Li Li
Dept. Mechanical Engineering
University of Arkansas
Fayetteville, AR 72701
Tel: 501-521-9890
Fax: 501-575-6982
E-mail: [email protected]
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