hi, Everybody:
        I am trying to etch microchannel on glass (borosilicate glass,7740),
but, lack of the support to do LPCVD poly-silicon on glass, the only subsitution
I know is Cr/Au, but I really don't know if it can resist deept etching for me,
about 320 mu m...
        Besides, I don't know if amorphous silicon can resist to HF etching,
I want to do deep etching, so I will use HF about 48% solution...
        Any suggestions will be granted! I will appreciate..

        Thanks a lot,
        Sincerely

Jerry Lee
Insitute of Applied Mechanics
email: [email protected] / [email protected]