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MEMSnet Home: MEMS-Talk: Test machine
Test machine
1999-02-22
Abraham
Test machine
Abraham
1999-02-22
Hi,

we are a start-up manufacturer of miniaturised test instruments for in-line
quality monitoring of thin films in semiconductor and thin film industry.
We are currently working on a new machine, which allows to measure thin
films and silicon membranes up to 50 µm as well as lateral dimensions of
micromechanical objects by one and the same unit. I am looking for input
concerning specs which are needed by the MEMS industry and typical
measurement problems.

Regards

Michael

Dr. Michael Abraham
President
NanoPhotonics AG
Galileio-Galilei-Str. 28
D-55129 Mainz
Germany

Phone: 49 (0)6131 95854 12
Fax: 49 (0) 6131 95854 20
E-mail: [email protected]
Homepage address: http://www.nanophotonics.de


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